A Novel Microfabrication Technique for Three- Dimensional Metal Structures by Photocatalysis
نویسندگان
چکیده
Though there are a variety of microfabrication techniques, one that can fabricate three-dimensional metal structure by simple procedure is rarely seen. Given this fact, we suggest a new method for threedimensional microfabrication that is characterized by photocatalytic deposition. The setup for this method consists of a wavelength 405nm laser diode, a numerical aperture 0.9 objective lens, and a motorized linear stage. With this setup, it was observed that a converging near-ultraviolet laser beam caused deposition of Ag at the beam waist in AgNO3 solution including TiO2 nanoparticles. Furthermore, we succeeded in fabricating a microbox and a microcoil by sweeping the beam waist in the solution.
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